Integrated Microsystem Laboratory
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Il-Joo Cho
Post Doc.
Department of Electrical and Computer Engineering

Room 4-166 EE/CSCI Building
200 Union St. SE
Minneapolis, MN 55455

choxx183@umn.edu
Tel - 612-626-0590

B.S. Korea Advanced Institute of Science and Technology (KAIST), 1998
M.S. KAIST, 2000
Ph.D. KAIST, 2004

Biography
Publications
Patents
Il-Joo Cho received his B.S. in 1998 and his M.S degree in 2000 in Electrical Engineering from the Korea Advanced Institute of Science and Technology (KAIST). He received his Ph.D. degree from KAIST in 2004. His doctorial research concerned the MEMS micromirrors and RF MEMS switches.

From 2004 to 2007 he worked for LG Electronics Institute of Technology in Seoul, Korea as a senior research engineer. He worked on NDSS (Nano Data Storage System) and RF MEMS switch.

In 2007, he joined the Department of Electrical Engineering and Computer Engineering at the University of Minnesota in Minneapolis, MN as a research associate. His research interests are in RF MEMS systems and Bio MEMS systems integrated with VLSI circuits.

Journals
  1. Hyo-Jin Nam, Young-Sik Kim, Caroline Sunyong Lee, Won-Hyeog Jin, Seong-Soo Jang, Il-Joo Cho, Jong-Uk Bu, Woo Beom Choi and Seung Woo Choi, "Silicon nitride cantilever array integrated with silicon heaters and piezoelectric detectors for probe-based data storage," Sensors and Actuators A: Physical, Volume 134, Issue 2, pp 329-333, March 2007.
  2. Young-Sik Kim, Seongsoo Jang, Caroline Sunyong Lee, Won-Hyeog Jin, II-Joo Cho, Man-Hyo Ha, Hyo-Jin Nam, Jong-Uk Bu, Sun-II Chang and Euisik Yoon "Thermo-piezoelectric Si3N4 cantilever array on CMOS circuit for high density probe-based data storage," Sensors and Actuators A: Physical, Volume 135, Issue 1, pp. 67-72, March 2007.
  3. Seongsoo Jang, Won-Hyeog Jin, Young-Sik Kim, Il-Joo Cho, DaeSung Lee, Hyo-Jin Nam, and Jong. U. Bu, "Thermopiezoelectric Cantilever for Probe-Based Data Storage System," Journal of Semiconductor Technology and Science, Volume 6, No. 4, pp. 293-298, December 2006.
  4. Caroline Sun-Yong Lee, Sung-Geun Kim, Suk-Yong Jeong, Sung-Hoon Ahn, Won-Hyeog Jin, Sung-Soo Jang, Il-Joo Cho, Young-Sik Kim and Hyo-Jin Nam , "Thermal analysis of micro cantilevers integrated with heaters for low power nano-data-storage application" Sensors and Actuators A: Physical, In Press, Corrected Proof, Available online, November 2006.
  5. Il-Joo Cho, Taeksang Song, Sang-Hyun Baek and Euisik Yoon, "A Low-Voltage and Low-Power RF MEMS Series and Shunt Switches Actuated by Combination of Electromagnetic and Electrostatic Forces", IEEE Transactions on Microwave Theory and Techniques, Vol., 53, No.7, July 2005.
  6. Kwang-Seok Yun, Il-Joo Cho, Jong-Uk Bu, Chang-Jin Kim and Euisik Yoon, "A Surface Tension Driven Micropump for Low-Voltage and Low-Power Operations," Journal of Microelectromechanical Systems, Vol. 11, Issue 5, pp. 454-461, October 2002.
  7. Kwang-Hyun Lee, Hyung-Kew Lee, Hee-Jin Byun, Il-Joo Cho, Jong-Uk Bu and Euisik Yoon, "An Audio Frequency Filter Application of Micromachined Thermally-Isolated Diaphragm Structures," Sensors and Actuators A: Physical, vol. 89, pp.49-55, March 2001.
  8. Il-Joo Cho, Eun-Chul Park, Songcheol Hong, Euisik Yoon, "Atomic Force Microscope Probe Tips Using Heavily Boron-Doped Silicon Cantilevers Realized in a <110> Bulk Silicon Wafer," Japanese Journal of Applied Physics - Part 1:Regular Papers and Short Notes, Vol. 39, No. 12B, pp. 7103-7179, December 2000.

Conferences
  1. Caroline Sunyong Lee , Suk-Yong Jeong, Sung-Hoon Ahn, Won-Hyeog Jin, SeongSoo Jang, Il-Joo Cho, Young-Sik Kim, Hyo-Jin Nam, "Thermal analysis of microcantilevers integrated with heaters for low power nano-data storage application," APCOT 2006 (Asia-Pacific Conference of Transducers and Micro-Nano Technology), Singapore, pp.251-254, June, 2006.
  2. Won-Hyeog Jin, Young-Sik Kim, Il-Joo Cho, SeongSoo Jang, Caroline Sunyong Lee, Hyo-Jin Nam, and Jong-Uk Bu, "Study of PZT degradation during wafer-level bonding of thermo-piezoelectric cantilevers with CMOS wafer for probe-based data storage," 18th international symposium on integrated ferroelectrics (ISIF 2006), Hawaii, USA, April, 2006.
  3. Won-Hyeog Jin, Young-Sik Kim, Il-Joo Cho, SeongSoo Jang, Caroline Sunyong Lee, Hyo-Jin Nam, and Jong-Uk Bu, "Charge Amplifier for Probe-based Data Storage System Using Thermopiezoelectric Cantilever," Scanning Probe Microscopy, Sensors and Nanostructures, Montpellier, France, June, 2006.
  4. Il-Joo Cho, Caroline Sunyong Lee, Young-Sik Kim, Hyo-Jin Nam, SeongSoo Jang, Won-Hyeog Jin, Jong-Uk Bu, Sun-Il Chang and Euisik Yoon, "Transfer of Si3N4 Cantilever Array on a CMOS Circuit Using New Wafer Level Bonding for Probe-Based Nano Data Storage Application," MRS 2006, San Francisco, USA, April, 2006.
  5. Young-Sik Kim, Hyo-Jin Nam, SeongSoo Jang, Caroline Sunyong Lee, Won-Hyeog Jin, Il-Joo Cho, Jong-Uk Bu, Sun-Il Chang and Euisik Yoon, "Wafer-level transfer of thermo-piezoelectric Si3N4 cantilever array on a CMOS circuit for high density probe based data storage," IEEE International Conference on MEMS, Istanbul, Turkey, pp.247-250, January, 2006.
  6. Seongsoo Jang, Won-Hyeog Jin, Young-Sik Kim, Il-Joo Cho, Daesung Lee, Hyo-Jin Nam, Jong-Uk Bu, "Thermopiezoelectric Cantilever for Probe based Data Storage System," 2006 International SoC Design Conference, Seoul, Korea, October, 2006.
  7. SeongSoo Jang, Hyo-Jin Nam, Young-Sik Kim, Caroline Sunyong lee, Won-Hyeog Jin, Il-Joo Cho and Jong-Uk Bu, "Silicon Nitride Cantilever Arrays Integrated with Si Heater and Piezoelectric Sensor for SPM DATA Storage Applications," 1st Korea-Switzerland Science & Technology, Lausanne, Switzerland, May, 2005.
  8. Maesoon Im, Il-Joo Cho, Kwang-Seok Yun, and Euisik Yoon, "An Electromagnetically-Actuated Polymer Micro-Pen for Picoliter Biological Assay Patterning," 13th International Conference on Solid-State Sensors and Actuators (Transducers'05), Seoul, Korea, 1588-1591, June, 2005.
  9. Il-Joo Cho, Taeksang Song, Sang-Hyun Baek and Euisik Yoon, "A Shunt-Type RF MEMS Switch at 3.3V Operation Actuated by Lorentz Force and Electrostatic Hold," 13th International Conference on Solid-State Sensors and Actuators (Transducers'05), Seoul, Korea, pp.1051-1054, June, 2005.
  10. Il-Joo Cho, Taeksang Song, Sang-Hyun Baek, and Euisik Yoon, "A Low-Voltage Push-Pull SPDT RF MEMS Switch Operated by Combination of Electromagnetic Actuation and Electrostatic Hold," Proceedings of the 17th IEEE International Conference on MEMS, Miami Beach, USA, pp. 32-35, January, 2005.
  11. Hyo-Jin Nam, Young-Sik Kim, Sunyong Lee, Won-Hyeog Jin, Seong Soo Jang, Il-Joo Cho, Jong-Uk Bu, "Integrated nitride cantilever array with Si heaters and piezoelectric detectors for nano-data-storage application," Proceedings of the 17th IEEE International Conference on MEMS, Miami Beach, USA, pp. 247-250, January, 2005.
  12. Il-Joo Cho, Taeksang Song, Sang-Hyun Baek and Euisik Yoon, "A Low-Voltage and Low-Power RF MEMS Switch Actuated by Combination of Electromagnetic and Electrostatic Forces," Proceedings of 34th European Microwave Conference, Amsterdam, Netherlands, October, 2004.
  13. Hyung-Kew Lee, Kyu-Sang Kim, Il-Joo Cho and Euisik Yoon, "A Wide Range Linealy-Tunable Optical Filter Using Magnetic Actuation," Proceedings of IEEE the 16th International Conference on MEMS, Masstriccht, Netherlands, pp. 93-96, January, 2004.
  14. Il-Joo Cho and Euisik Yoon, "A Low-Voltage Three-Axis Electromagnetically Actuated Micromirror for High Coupling Efficiency," Proceedings of IEEE International Conference on Optical MEMS, Hawaii, USA, pp. 123-124, August, 2003.
  15. Il-Joo Cho, Kwang-Seok Yun, Jun-Bo Yoon and Euisik Yoon, "A Low Voltage Two-Axis Electromagnetically Actuated Micromirror with Bulk Silicon Mirror Plates and Torsion Bars," Proceedings of IEEE the 15th International Conference on MEMS, Las Vegas, USA, pp.540-543, January 2002.
  16. Kwang-Seok Yun, Il-Joo Cho, Jong-Uk Bu, Chang-Jin Kim and Euisik Yoon, "A Surface Tension Driven Micropump for Low-Voltage and Low-Power Operations," Proceedings of IEEE the 14th International Conference on Micro Electro Mechanical Systems, Interlaken, Switzerland, pp. 487-490, January, 2001.
  17. Youngjoo Yee, Jong-Uk Bu, Il-Joo Cho, Euisik Yoon, Su-Dong Moon, Shinill Kang, "Micro Solid Immersion Lens Fabricated by Micro-Molding for Near-Field Optical Data Storage," Proceedings of IEEE International Conference on Optical MEMS, Hawaii, USA, pp. 91-92, August, 2000.
  18. Kwang-Hyun Lee, Hee-Jin Byun, Hyung-Kew Lee, Il-Joo Cho, Jong-Uk Bu and Euisik Yoon, "An Audio Frequency Filter Application of Micromachined Thermally-Isolated Diaphragm Structures," Proceedings of IEEE the 13th International Conference on MEMS, Kyoto, Japan, pp.142-147, January 2000.
  19. Il-Joo Cho, Eun-Chul Park, Songcheol Hong, Euisik Yoon, "Atomic Force Microscope Probe Tips Using Heavily Boron-Doped Silicon Cantilevers Realized in a <110> Bulk Silicon Wafer," Proceedings of International Microprocesses and Nanotechnology Conference, Tokyo, Japan, pp.230-231, July 2000.
  1. Il-Joo Cho, Kwang-Seok Yun and Euisik Yoon, "Electromagnetically actuated micromirror actuator and fabrication method thereof ," U.S. Patent #6,781,732 (2004)
  2. Il-Joo Cho, Eun-Chul Park, Songcheol Hong and Euisik Yoon, "Probe for Scanning Probe Microscope and Method of Fabricating the Same," U.S. Patent #7,119,332 (2006)
  3. Il-Joo Cho and Euisik Yoon, "Low-voltage and low-power toggle type-SPDT RF MEMS switch actuated by combination of electromagnetic and electrostatic forces", U.S. Files # 2004/980333
  4. Il-Joo Cho, Eun-Chul Park, Sehyung Cho, Seongchul Hong, Euisik Yoon, "Fabrication method of SPM probe tips using P+ silicon cantilevers realized in <110>bulk silicon wafer ," Korea Patent #319028(2001)
  5. Hyung-Kew Lee, Il-Joo Cho, Jun-Bo Yoon, Euisik Yoon, "Tunable optical filter," Korea Patent #411328(2003)
  6. Il-Joo Cho, Euisik Yoon, "Micro switch ," Korea Patent #530007 (2003)
  7. Il-Joo Cho, Kwang-Seok Yun, Euisik Yoon, "Electromagnetically actuated micromirror actuator and manufacturing method thereof ," Korea Patent #439700 (2004)
  8. Il-Joo Cho, Euisik Yoon, "Low-voltage and low-power toggle type - SPDT(Single Pole Double Throw) RF MEMS switch actuated by combination of electromagnetic and electrostatic forces," Korea Patent #530010 (2005)
  9. Il-Joo Cho, San-Cheon Kom, Hyo-Jin Nam, "Small perfume injector for mobile communication application," Korea Patent #614967 (2006)
  10. Il-Joo Cho, "Micro scanner and method for driving the same," Korea Patent #631280 (2006)
  11. Il-Joo Cho, "Nano data storage device and method for packaging the same," Korea Patent #642004 (2006)
  12. Il-Joo Cho, "Micromirror actuated by combination of electromagnetic and electrostatic forces,", Korea Patent #6448930 (2006)
  13. Il-Joo Cho, "2D Microscanner for nano data storage system,", Korea Patent #6448940 (2006)
  14. Il-Joo Cho, Hyo-Jin Nam, "A apparatus for scanning high-speed data storage and method for manufacturing the apparatus," Korea Patent #662463 (2006)